| Scan range: |
80 µm x 80 µm
x 5 µm
hardware linearized scan motion in X-Y-direction (optional
in Z-direction) |
|
Position
resolution translation stage: |
0.5 µm |
| Noise level: |
< 0,1 nm rms in vertical direction (Z) |
Accuracy
of translation stage:
|
± 2 µm |
| Scan speed: |
typ. 1 to 10 Hz |
Deviation
between optical and AFM position: |
< 2 µm |
| SPM modes: : |
all modes applicable |
Scriber:
|
Diamond tip with sensor controlled load force |
| Tip change:: |
adjustment free |
Enclosure: |
Active antivibration, noise shield |
| Microscope: |
Zeiss Axiotech optional with bright/dark
field or differential interference contrast (DIC) |
|
Operating system: |
MS-Windows 2000®, XP |
| Position resolution rotary stage: |
10 mgrad |
Footprint: |
800 mm x 800 mm,
height 1800 mm |
Accuracy
of rotary stage: |
± 8 mgrad |
System weight: |
approximate 250 kg |
